Semiconductor-on-insulator constructions

ABSTRACT

The invention includes semiconductor constructions having a thin film stacked resistor in electrical connection with a source/drain region of a transistor device. The resistor includes first and second crystalline layers which may or may not differ from one another. One of the first and second crystalline layers comprises doped silicon/germanium, and the other comprises doped silicon. The transistor device and resistor can be part of an SOI construction formed over a conventional substrate (such as a monocrystalline silicon wafer) or a non-conventional substrate (such as one or more of glass, aluminum oxide, silicon dioxide, metal and plastic). The invention also includes processes of forming semiconductor constructions, and in particular aspects, includes processes of forming resistor constructions.

TECHNICAL FIELD

The invention pertains to semiconductor constructions comprisingtransistors and resistors; and also pertains to methods of formingsemiconductor constructions. In particular aspects, the inventionpertains to processes of forming resistor constructions.

BACKGROUND OF THE INVENTION

SOI technology differs from traditional bulk semiconductor technologiesin that the active semiconductor material of SOI technologies istypically much thinner than that utilized in bulk technologies. Theactive semiconductor material of SOI technologies will typically beformed as a thin film over an insulating material (typically oxide),with exemplary thicknesses of the semiconductor film being less than orequal to 2000 Å. In contrast, bulk semiconductor material will typicallyhave a thickness of at least about 200 microns. The thin semiconductorof SOI technology can allow higher performance and lower powerconsumption to be achieved in integrated circuits than can be achievedwith similar circuits utilizing bulk materials.

An exemplary integrated circuit device that can be formed utilizing SOItechnologies is a so-called thin film transistor (TFT), with the term“thin film” referring to the thin semiconductor film of the SOIconstruction. In particular aspects, the semiconductor material of theSOI construction can be silicon, and in such aspects the TFTs can befabricated using recrystallized amorphous silicon or polycrystallinesilicon. The silicon can be supported by an electrically insulativematerial (such as silicon dioxide), which in turn is supported by anappropriate substrate. Exemplary substrate materials include glass, bulksilicon and metal-oxides (such as, for example, Al₂O₃). If thesemiconductor material comprises silicon, the term SOI is occasionallyutilized to refer to a silicon-on-insulator construction, rather thanthe more general concept of a semiconductor-on-insulator construction.However, it is to be understood that in the context of this disclosurethe term SOI refers to semiconductor-on-insulator constructions.Accordingly, the semiconductor material of an SOI construction referredto in the context of this disclosure can comprise other semiconductivematerials in addition to, or alternatively to, silicon; including, forexample, germanium.

A problem associated with conventional TFT constructions is that grainboundaries and defects can limit carrier mobilities. Accordingly,carrier mobilities are frequently nearly an order of magnitude lowerthan they would be in bulk semiconductor devices. High voltage (andtherefore high power consumption), and large areas are utilized for theTFTs, and the TFTs exhibit limited performance. TFTs thus have limitedcommercial application and currently are utilized primarily for largearea electronics.

Various efforts have been made to improve carrier mobility of TFTs. Someimprovement is obtained for devices in which silicon is thesemiconductor material by utilizing a thermal anneal for grain growthfollowing silicon ion implantation and hydrogen passivation of grainboundaries (see, for example, Yamauchi, N. et al., “Drastically ImprovedPerformance in Poly-Si TFTs with Channel Dimensions Comparable to GrainSize”, IEDM Tech. Digest, 1989, pp. 353-356). Improvements have alsobeen made in devices in which a combination of silicon and germanium isthe semiconductor material by optimizing the germanium and hydrogencontent of silicon/germanium films (see, for example, King, T. J. et al,“A Low-Temperature (<=550° C.) Silicon-Germanium MOS TFT Technology forLarge-Area Electronics”, IEDM Tech. Digest, 1991, pp. 567-570).

Investigations have shown that nucleation, direction of solidification,and grain growth of silicon crystals can be controlled selectively andpreferentially by excimer laser annealing, as well as by lateralscanning continuous wave laser irradiation/anneal for recrystallization(see, for example, Kuriyama, H. et al., “High Mobility Poly-Si TFT by aNew Excimer Laser Annealing Method for Large Area Electronics”, IEDMTech. Digest, 1991, pp. 563-566; Jeon, J. H. et al., “A New Poly-Si TFTwith Selectively Doped Channel Fabricated by Novel Excimer LaserAnnealing”, IEDM Tech. Digest, 2000, pp. 213-216; Kim, C. H. et al., “ANew High-Performance Poly-Si TFT by Simple Excimer Laser Annealing onSelectively Floating a Si Layer”, IEDM Tech. Digest, 2001, pp. 753-756;Hara, A. et al, “Selective Single-Crystalline-Silicon Growth at thePre-Defined Active Regions of TFTs on a Glass by a Scanning CW LayerIrradiation”, IEDM Tech. Digest, 2000, pp. 209-212; and Hara, A. et al.,“High Performance Poly-Si TFTs on a Glass by a Stable Scanning CW LaserLateral Crystallization”, IEDM Tech. Digest, 2001, pp. 747-750). Suchtechniques have allowed relatively defect-free large crystals to begrown, with resulting TFTs shown to exhibit carrier mobility over 300cm²/V-second.

Another technique which has shown promise for improving carrier mobilityis metal-induced lateral recrystallization (MILC), which can be utilizedin conjunction with an appropriate high temperature anneal (see, forexample, Jagar, S. et al., “Single Grain TFT with SOI CMOS PerformanceFormed by Metal-Induced-Lateral-Crystallization”, IEDM Tech. Digest,1999, p.293-296; and Gu, J. et al., “High Performance Sub-100 nm Si TFTby Pattern-Controlled Crystallization of Thin Channel Layer and HighTemperature Annealing”, DRC Conference Digest, 2002, pp. 49-50). Asuitable post-recrystallization anneal for improving the film qualitywithin silicon recrystallized by MILC is accomplished by exposingrecrystallized material to a temperature of from about 850° C. to about900° C. under an inert ambient (with a suitable ambient comprising, forexample, N₂). MILC can allow nearly single crystal silicon grains to beformed in predefined amorphous-silicon islands for device channelregions. Nickel-induced-lateral-recrystallization can allow deviceproperties to approach those of single crystal silicon.

The carrier mobility of a transistor channel region can be significantlyenhanced if the channel region is made of a semiconductor materialhaving a strained crystalline lattice (such as, for example, asilicon/germanium material having a strained lattice, or a siliconmaterial having a strained lattice) formed over a semiconductor materialhaving a relaxed lattice (such as, for example, a silicon/germaniummaterial having a relaxed crystalline lattice). (See, for example, Rim,K. et al., “Strained Si NMOSFETs for High Performance CMOS Technology”,VLSI Tech. Digest, 2001, p.59-60; Cheng, Z. et al., “SiGe-On-Insulator(SGOI) Substrate Preparation and MOSFET Fabrication for ElectronMobility Evaluation” 2001 IEEE SOI Conference Digest, October 2001, pp.13-14; Huang, L. J. et al., “Carrier Mobility Enhancement in StrainedSi-on-Insulator Fabricated by Wafer Bonding”, VLSI Tech. Digest, 2001,pp. 57-58; and Mizuno, T. et al., “High Performance CMOS Operation ofStrained-SOI MOSFETs Using Thin Film SiGe-on-Insulator Substrate”, VLSITech. Digest, 2002, p.106-107.)

The terms “relaxed crystalline lattice” and “strained crystallinelattice” are utilized to refer to crystalline lattices which are withina defined lattice configuration for the semiconductor material, orperturbed from the defined lattice configuration, respectively. Inapplications in which the relaxed lattice material comprisessilicon/germanium having a germanium concentration of from 10% to 60%,mobility enhancements of 110% for electrons and 60-80% for holes can beaccomplished by utilizing a strained lattice material in combinationwith the relaxed lattice material (see for example, Rim, K. et al.,“Characteristics and Device Design of Sub-100 nm Strained SiN andPMOSFETs”, VLSI Tech. Digest, 2002, 00. 98-99; and Huang, L. J. et al.,“Carrier Mobility Enhancement in Strained Si-on-Insulator Fabricated byWafer Bonding”, VLSI Tech. Digest, 2001, pp. 57-58).

Performance enhancements of standard field effect transistor devices arebecoming limited with progressive lithographic scaling in conventionalapplications. Accordingly, strained-lattice-channeled-field effecttransistors on relaxed silicon/germanium offers an opportunity toenhance device performance beyond that achieved through conventionallithographic scaling. IBM recently announced the world's fastestcommunications chip following the approach of utilizing a strainedcrystalline lattice over a relaxed crystalline lattice (see, forexample, “IBM Builds World's Fastest Communications Microchip”, ReutersU.S. Company News, Feb. 25, 2002; and Markoff, J., “IBM Circuits are NowFaster and Reduce Use of Power”, The New York Times, Feb. 25, 2002).

Although various techniques have been developed for substantiallycontrolling nucleation and grain growth processes of semiconductormaterials, grain orientation control is lacking. Further, thepost-anneal treatment utilized in conjunction with MILC can beunsuitable in applications in which a low thermal budget is desired.Among the advantages of the invention described below is that such canallow substantial control of crystal grain orientation within asemiconductor material, while lowering thermal budget requirementsrelative to conventional methods. Additionally, the quality of the growncrystal formed from a semiconductor material can be improved relative tothat of conventional methods.

Field effect transistor devices can be utilized in various types ofcircuitry. For instance, field effect transistor devices can beincorporated into transistor/resistor constructions. FIG. 1 shows aschematic diagram of a construction 2 comprising a transistor 4 and aresistor 6. The transistor has one source/drain region extending throughthe resistor to V_(DD) potential, and has another source/drain region atground potential. The gate of the transistor is tied to an electricalnode 8 which controls potential and/or current flow at the gate.

Transistors and resistors are common components of semiconductorcircuitry. A continuing goal in fabrication of semiconductor circuitryis to increase a density of the circuitry. Accordingly, there is acontinuing goal to reduce the footprint associated withtransistor/resistor constructions, while maintaining desired performancecharacteristics of the constructions.

SUMMARY OF THE INVENTION

In one aspect, the invention pertains to a semiconductor constructioncomprising a transistor device and a resistor. The transistor deviceincludes a gate and an active region proximate the gate. The activeregion comprises a pair of source/drain regions. A resistor is inelectrical connection with one of the source/drain regions. The resistorcomprises a first crystalline layer and a second crystalline layer overthe first crystalline layer. The second crystalline layer has adifferent composition than the first crystalline layer. The secondcrystalline layer comprises doped silicon/germanium and the firstcrystalline layer comprises doped silicon. The transistor device andresistor can be part of an SOI construction formed over a conventionalsubstrate (such as a monocrystalline silicon wafer) or anon-conventional substrate (such as one or more of glass, aluminumoxide, silicon dioxide, metal and plastic).

In another aspect, the invention encompasses a process of forming aresistor construction. A first crystalline layer is formed over asubstrate. The first crystalline layer comprises one or more siliconseed crystals. A second crystalline layer is formed over the firstcrystalline layer. The second crystalline comprises Si/Ge. The first andsecond layers together are comprised by a resistor which extends betweena first electrical node and a second electrical node.

BRIEF DESCRIPTION OF THE DRAWINGS

Preferred embodiments of the invention are described below withreference to the following accompanying drawings.

FIG. 1 is a schematic diagram of a prior art construction comprising atransistor and resistor.

FIG. 2 is a diagrammatic, cross-sectional view of a fragment of asemiconductor construction shown at a preliminary stage of an exemplaryprocess of the present invention

FIG. 3 is a view of the FIG. 2 wafer shown at a processing stagesubsequent to that of FIG. 2.

FIG. 4 is a view of the FIG. 2 fragment shown at a processing stagesubsequent to that of FIG. 3.

FIG. 5 is a view of the FIG. 2 fragment shown at a processing stagesubsequent to that of FIG. 4.

FIG. 6 is a view of the FIG. 2 fragment shown at a processing stagesubsequent to that of FIG. 5.

FIG. 7 is a view of the FIG. 2 fragment shown at a processing stagesubsequent to that of FIG. 6.

FIG. 8 is an expanded region of the FIG. 7 fragment shown at aprocessing stage subsequent to that of FIG. 7 in accordance with anexemplary embodiment of the present invention.

FIG. 9 is a view of the FIG. 8 fragment shown at a processing stagesubsequent to that of FIG. 8.

FIG. 10 is a view of an expanded region of FIG. 7 shown at a processingstage subsequent to that of FIG. 7 in accordance with an alternativeembodiment relative to that of FIG. 8.

FIG. 11 is a diagrammatic, cross-sectional view of a semiconductorfragment illustrating an exemplary semiconductor construction comprisinga transistor and resistor.

FIG. 12 is a top cross-sectional view along the line 12-12 of theconstruction comprising the FIG. 11 fragment. The FIG. 11 cross-sectionis along the line 11-11 of FIG. 12.

FIG. 13 is a diagrammatic view of a computer illustrating an exemplaryapplication of the present invention.

FIG. 14 is a block diagram showing particular features of themotherboard of the FIG. 13 computer.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

An exemplary method of forming an SOI construction in accordance with anaspect of the present invention is described with reference to FIGS.2-7.

Referring initially to FIG. 2, a fragment of a semiconductorconstruction 10 is illustrated at a preliminary processing stage. To aidin interpretation of the claims that follow, the terms “semiconductivesubstrate” and “semiconductor substrate” are defined to mean anyconstruction comprising semiconductive material, including, but notlimited to, bulk semiconductive materials such as a semiconductive wafer(either alone or in assemblies comprising other materials thereon), andsemiconductive material layers (either alone or in assemblies comprisingother materials). The term “substrate” refers to any supportingstructure, including, but not limited to, the semiconductive substratesdescribed above.

Construction 10 comprises a base (or substrate) 12 and an insulatorlayer 14 over the base. Base 12 can comprise, for example, one or moreof glass, aluminum oxide, silicon dioxide, metal and plastic.Additionally, and/or alternatively, base 12 can comprisea semiconductormaterial, such as, for example, a silicon wafer.

Layer 14 comprises an electrically insulative material, and inparticular applications can comprise, consist essentially of, or consistof silicon dioxide. In the shown construction, insulator layer 14 is inphysical contact with base 12. It is to be understood, however, thatthere can be intervening materials and layers provided between base 12and layer 14 in other aspects of the invention (not shown). For example,a chemically passive thermally stable material, such as silicon nitride(Si₃N₄), can be incorporated between base 12 and layer 14. Layer 14 canhave a thickness of, for example, from about 200 nanometers to about 500nanometers, and can be referred to as a buffer layer.

Layer 14 preferably has a planarized upper surface. The planarized uppersurface can be formed by, for example, chemical-mechanical polishing.

A layer 16 of semiconductive material is provided over insulator layer14. In the shown embodiment, semiconductive material layer 16 is formedin physical contact with insulator 14. Layer 16 can have a thickness of,for example, from about 5 nanometers to about 10 nanometers. Layer 16can, for example, comprise, consist essentially of, or consist of eitherdoped or undoped silicon. If layer 16 comprises, consists essentiallyof, or consists of doped silicon, the dopant concentration can be fromabout 10¹⁴ atoms/cm³ to about 10²⁰ atoms/cm³. The dopant can be eithern-type or p-type, or a combination of n-type and p-type.

The silicon utilized in layer 16 can be either polycrystalline siliconor amorphous silicon at the processing stage of FIG. 2. It can beadvantageous to utilize amorphous silicon in that it is typically easierto deposit a uniform layer of amorphous silicon than to deposit auniform layer of polycrystalline silicon.

Referring to FIG. 3, material 16 is patterned into a plurality ofdiscrete islands (or blocks) 18. Such can be accomplished utilizing, forexample, photbresist (not shown) and photolithographic processing,together with an appropriate etch of material 16.

A capping layer 20 is provided over islands 18 and over portions oflayer 14 exposed between the islands. Layer 20 can, for example,comprise, consist essentially of, or consist of one or both of silicondioxide and silicon. Layer 20 can also comprise multiple layers ofsilicon dioxide, stress-free silicon oxynitride, and silicon.

After formation of capping layer 20, small voids (nanovoids) and smallcrystals are formed in the islands 18. The formation of the voids andcrystals can be accomplished by ion implanting helium 22 into material16 and subsequently exposing material 16 to laser-emittedelectromagnetic radiation. The helium can aid in formation of thenanovoids; and the nanovoids can in turn aid in crystallization andstress relief within the material 16 during exposure to theelectromagnetic radiation. The helium can thus allow crystallization tooccur at lower thermal budgets than can be achieved without the heliumimplantation. The helium is preferably implanted selectively intoislands 18 and not into regions between the islands. The exposure ofconstruction 10 to electromagnetic radiation can comprise subjecting theconstruction to scanned continuous wave laser irradiation while theconstruction is held at an appropriate elevated temperature (typicallyfrom about 300° C. to about 450° C.). The exposure to theelectromagnetic radiation can complete formation of single crystal seedswithin islands 18. The laser irradiation is scanned along an axis 24 inthe exemplary shown embodiment.

The capping layer 20 discussed previously is optional, but canbeneficially assist in retaining helium within islands 18 and/orpreventing undesirable impurity contamination during the treatment withthe laser irradiation.

Referring to FIG. 4, islands 18 are illustrated after voids have beenformed therein. Additionally, small crystals (not shown) have also beenformed within islands 18 as discussed above.

Capping layer 20 (FIG. 3) is removed, and subsequently a layer 26 ofsemiconductive material is formed over islands 18. Layer 26 cancomprise, consist essentially of, or consist of silicon and germanium;or alternatively can comprise, consist essentially of, or consist ofdoped silicon/germanium. The germanium concentration within layer 26 canbe, for example, from about 10 atomic percent to about 60 atomicpercent. In the shown embodiment, layer 26 physically contacts islands18, and also physically contacts insulator layer 14 in gaps between theislands. Layer 26 can be formed to a thickness of, for example, fromabout 50 nanometers to about 100 nanometers, and can be formed utilizinga suitable deposition method, such as, for example, plasma-assistedchemical vapor deposition.

A capping layer 28 is formed over semiconductor layer 26. Capping layer28 can comprise, for example, silicon dioxide. Alternatively, cappinglayer 28 can comprise, for example, a combination of silicon dioxide andstress-free silicon oxynitride. Capping layer 28 can protect a surfaceof layer 26 from particles and contaminants that could otherwise fall onlayer 26. If the processing of construction 10 occurs in an environmentin which particle formation and/or incorporation of contaminants isunlikely (for example, an ultrahigh vacuum environment), layer 28 can beeliminated from the process. Layer 28 is utilized in the patterning of ametal (discussed below). If layer 28 is eliminated from the process,other methods besides those discussed specifically herein can beutilized for patterning the metal.

Referring to FIG. 5, openings 30 are extended through capping layer 28and to an upper surface of semiconductive material 26. Openings 30 canbe formed by, for example, photolithographic processing to pattern alayer of photoresist (not shown) into a mask, followed by a suitableetch of layer 28 and subsequent removal of the photoresist mask.

A layer 32 of metal-containing material is provided within openings 30,and in physical contact with an upper surface of semiconductive material26. Layer 32 can have a thickness of, for example, less than or equal toabout 10 nanometers. The material of layer 32 can comprise, consistessentially of, or consist of, for example, nickel. Layer 32 can beformed by, for example, physical vapor deposition. Layer 32 can beformed to be within openings 30 and not over material 28 (as isillustrated in FIG. 5) by utilizing deposition conditions whichselectively form metal-containing layer 32 on a surface of material 26relative to a surface of material 28. Alternatively, material 32 can bedeposited by a substantially non-selective process to form the material32 over the surface of material 28 as well as over the surface ofmaterial 26 within openings 30, and subsequently material 32 can beselectively removed from over surfaces of material 28 while remainingwithin openings 30. Such selective removal can be accomplished by, forexample, chemical-mechanical polishing, and/or by forming a photoresistmask (not shown) over the material 32 within openings 30, while leavingother portions of material 32 exposed, and subsequently removing suchother portions to leave only the segments of material 32 within openings30. The photoresist mask can then be removed.

Oxygen 34 is ion implanted through layers 26 and 28, and into layer 16to oxidize the material of layer 16. For instance, if layer 16 consistsof silicon, the oxygen can convert the silicon to silicon dioxide. Suchswells the material of layer 16, and accordingly fills the nanovoidsthat had been formed earlier. The oxygen preferably only partiallyoxidizes layer 16, with the oxidation being sufficient to fill all, orat least substantially all, of the nanovoids; but leaving at least someof the seed crystals within layer 16 that had been formed with the laserirradiation discussed previously. In some aspects, the oxidation canconvert a lower portion of material 16 to silicon dioxide while leavingan upper portion of material 16 as non-oxidized silicon.

The oxygen ion: utilized as implant 34 can comprise, for example, oxygen(O₂) or ozone (O₃). The oxygen ion implant can occur before or afterformation of openings 30 and provision of metal-containing layer 32.

Construction 10 is exposed to continuous wave laser irradiation whilebeing held at an appropriate temperature (which can be, for example,from about 300° C. to about 450° C.; or in particular applications canbe greater than or equal to 550° C.) to cause transformation of at leastsome of layer 26 to a crystalline form. The exposure to the laserirradiation comprises exposing the material of construction 10 tolaser-emitted electromagnetic radiation scanned along a shown axis 36.Preferably, the axis 36 along which the laser irradiation is scanned isthe same axis that was utilized for scanning of laser irradiation in theprocessing stage of FIG. 3.

The crystallization of material 26 (which can also be referred to as arecrystallization of the material) is induced utilizing metal-containinglayer 32, and accordingly corresponds to an application of MILC. TheMILC transforms material 26 to a crystalline form and the seed layerprovides the crystallographic orientation while undergoing partialoxidation.

The crystal orientation within crystallized layer 26 can originate fromthe crystals initially formed in islands 18. Accordingly, crystalorientations formed within layer 26 can be controlled through control ofthe crystal orientations formed within the semiconductive material 16 ofislands 18.

The oxidation of part of material 16 which was described previously canoccur simultaneously with the MILC arising from continuous wave laserirradiation. Partial oxidation of seed layer 16 facilitates: (1) Geenrichment into Si—Ge layer 26 (which improves carrier mobility); (2)stress-relief of Si—Ge layer 26; and (3) enhancement ofrecrystallization of Si—Ge layer 26. The crystallization of material 26can be followed by an anneal of material 26 at a temperature of, forexample, about 900° C. for a time of about 30 minutes, or by anappropriate rapid thermal anneal, to further ensure relaxed, defect-freecrystallization of material 26.

FIG. 6 shows construction 10 after the processing described above withreference to FIG. 5. Specifically, the voids that had been in material16 are absent due to the oxidation of material 16. Also, semiconductivematerial 26 has been transformed into a crystalline material(illustrated diagrammatically by the cross-hatching of material 26 inFIG. 6). Crystalline material 26 can consist of a single large crystal,and accordingly can be monocrystalline. Alternatively, crystallinematerial 26 can be polycrystalline. If crystalline material 26 ispolycrystalline, the crystals of the material will preferably be equalin size or larger than the blocks 18. In particular aspects., eachcrystal of the polycrystalline material can be about as large as one ofthe shown islands 18. Accordingly, the islands can be associated in aone-to-one correspondence with crystals of the polycrystalline material.

The shown metal layers 32 are effectively in a one-to-one relationshipwith islands 18, and such one-to-one correspondence of crystals toislands can occur during the MILC. Specifically, single crystals can begenerated relative to each of islands 18 during the MILC processdescribed with reference to FIG. 5. It is also noted, however, thatalthough the metal layers 32 are shown in a one-to-one relationship withthe islands in the cross-sectional views of FIGS. 5 and 6, theconstruction 10 comprising the shown fragment should be understood toextend three dimensionally. Accordingly, the islands 18 and metal layers32 can extend in directions corresponding to locations into and out ofthe page relative to the shown cross-sectional view. There can beregions of the construction which are not shown where a metal layeroverlaps with additional islands besides the shown islands.

Referring to FIG. 7, layers 28 and 32 (FIG. 6) are removed, andsubsequently a layer 40 of crystalline semiconductive material is formedover layer 26. In typical applications, layer 26 will have a relaxedcrystalline lattice and layer 40 will have a strained crystallinelattice. As discussed previously, layer 26 will typically comprise bothsilicon and germanium, with the germanium being present to aconcentration of from about 10 atomic percent to about 60 atomicpercent. Layer 40 can comprise, consist essentially of, or consist ofeither doped or undoped silicon; or alternatively can comprise, consistessentially of, or consist of either doped or undoped silicon/germanium.If layer 40 comprises silicon/germanium, the germanium content can befrom about 10 atomic percent to about 60 atomic percent.

Strained lattice layer 40 can be formed by utilizing methods similar tothose described in, for example, Huang, L. J. et al., “Carrier MobilityEnhancement in Strained Si-on-Insulator Fabricated by Wafer Bonding”,VLSI Tech. Digest, 2001, pp. 57-58; and Cheng, Z. et al.,“SiGe-On-Insulator (SGOI) Substrate Preparation and MOSFET Fabricationfor Electron Mobility Evaluation” 2001 IEEE SOI Conference Digest,October 2001, pp.13-14.

Strained lattice layer 40 can be large polycrystalline ormonocrystalline. If strained lattice layer 40 is polycrystalline, thecrystals of layer 40 can be large and in a one-to-one relationship withthe large crystals of a polycrystalline relaxed crystalline layer 26.Strained lattice layer 40 is preferably monocrystalline over theindividual blocks 18.

The strained crystalline lattice of layer 40 can improve mobility ofcarriers relative to the material 26 having a relaxed crystallinelattice. However, it is to be understood that layer 40 is optional invarious aspects of the invention.

Each of islands 18 can be considered to be associated with a separateactive region 42, 44 and 46. The active regions can be separated fromone another by insulative material subsequently formed through layers 26and 40 (not shown). For instance, a trenched isolation region can beformed through layers 26 and 40 by initially forming a trench extendingthrough layers 26 and 40 to insulative material 14, and subsequentlyfilling the trench with an appropriate insulative material such as, forexample, silicon dioxide.

As discussed previously, crystalline material 26 can be a single crystalextending across an entirety of the construction 10 comprising the shownfragment, and accordingly extending across all of the shown activeregions. Alternatively, crystalline material 26 can be polycrystalline.If crystalline material 26 is polycrystalline, the single crystals ofthe polycrystalline material will preferably be large enough so thatonly one single crystal extends across a given active region. In otherwords, active region 42 will preferably comprise a single crystal ofmaterial 26, active region 44 will comprise a single crystal of thematerial, and active region 46 will comprise a single crystal of thematerial, with the single crystals being separate and discrete relativeto one another.

FIG. 8 shows an expanded view of active region 44 at a processing stagesubsequent to that of FIG. 7, and specifically shows a transistor device50 associated with active region 44 and supported by crystallinematerial 26.

Transistor device 50 comprises a dielectric material 52 formed overstrained lattice 40, and a gate 54 formed over dielectric material 52.Dielectric material 52 typically comprises silicon dioxide, and gate 54typically comprises a stack including an appropriate conductivematerial, such as, for example, conductively-doped silicon and/or metal.

A channel region 56 is beneath gate 54, and in the shown constructionextends across strained crystalline lattice material 40. The channelregion may also extend into relaxed crystalline lattice material 26 (asshown). Channel region 56 is doped with a p-type dopant.

Transistor construction 50 additionally comprises source/drain regions58 which are separated from one another by channel region 56, and whichare doped with n-type dopant to an n⁺ concentration (typically, aconcentration of at least 10²¹ atoms/cm³). In the shown construction,source/drain regions 58 extend across strained lattice layer 40 and intorelaxed lattice material 26. Although source/drain regions 58 are shownextending only partially through relaxed lattice layer 26, it is to beunderstood that the invention encompasses other embodiments (not shown)in which the source/drain regions extend all the way through relaxedmaterial 26 and to material 16.

Channel region 56 and source/drain regions 58 can be formed byimplanting the appropriate dopants into crystalline materials 26 and 40.The dopants can be activated by rapid thermal activation (RTA), whichcan aid in keeping the thermal budget low for fabrication of fieldeffect transistor 50.

An active region of transistor device 50 extends across source/drainregions 58 and channel region 56. Preferably the portion of the activeregion within crystalline material 26 is associated with only one singlecrystal of material 26. Such can be accomplished by having material 26be entirely monocrystalline. Alternatively, material 26 can bepolycrystalline and comprise an individual single grain whichaccommodates the entire portion of the active region that is withinmaterial 26. The portion of strained lattice material 40 that isencompassed by the active region is preferably a single crystal, andcan, in particular aspects, be considered an extension of the singlecrystal of the relaxed lattice material 26 of the active region.

Crystalline materials 40 and 26 can, together with any crystallinestructures remaining in material 16, have a total thickness of less thanor equal to about 2000 Å. Accordingly the crystalline material cancorrespond to a thin film formed over an insulative material. Theinsulative material can be considered to be insulative layer 14 alone,or a combination of insulative layer 14 and oxidized portions ofmaterial 16.

The transistor structure 50 of FIG. 8 corresponds to an n-type fieldeffect transistor (NFET), and in such construction it can beadvantageous to have strained crystalline material 40 consist of astrained silicon material having appropriate dopants therein. Thestrained silicon material can improve mobility of electrons throughchannel region 56, which can improve performance of the NFET devicerelative to a device lacking the strained silicon lattice. Although itcan be preferred that strained lattice material 40 comprise silicon inan NFET device, it is to be understood that the strained lattice canalso comprise other semiconductive materials. A strained silicon latticecan be formed by various methods. For instance, strained silicon couldbe developed by various means and lattice 40 could be created by latticemismatch with other materials or by geometric conformallattice-straining on another substrate (mechanical stress).

As mentioned above, strained lattice 40 can comprise other materialsalternatively to, or additionally to, silicon. The strained lattice can,for example, comprise a combination of silicon and germanium. There canbe advantages to utilizing the strained crystalline lattice comprisingsilicon and germanium relative to structures lacking any strainedlattice. However, it is generally most preferable if the strainedlattice consists of silicon alone (or doped silicon), rather than acombination of silicon and germanium for an NFET device.

A pair of sidewall spacers 60 are shown formed along sidewalls of gate54, and an insulative mass 62 is shown extending over gate 54 andmaterial 40. Conductive interconnects 63 and 64 extend through theinsulative mass 62 to electrically connect with source/drain regions 58.Interconnects 63 and 64 can be utilized for electrically connectingtransistor construction 50 with other circuitry external to transistorconstruction 50. Such other circuitry can include, for example, abitline and a capacitor in applications in which construction 50 isincorporated into dynamic random access memory (DRAM).

FIG. 9 shows construction 10 at a processing stage subsequent to that ofFIG. 8, and shows a capacitor structure 100 formed over and inelectrical contact with conductive interconnect 64. The shown capacitorstructure extends across gate 54 and interconnect 63.

Capacitor construction 100 comprises a first capacitor electrode 102, asecond capacitor electrode 104, and a dielectric material 106 betweencapacitor electrodes 102 and 104. Capacitor electrodes 102 and 104 cancomprise any appropriate conductive material, including, for example,conductively-doped silicon. In particular aspects, electrodes 102 and104 will each comprise n-type doped silicon, such as, for example,polycrystalline silicon doped to a concentration of at least about 10²¹atoms/cm³ with n-type dopant. In a particular aspect of the invention,electrode 102, conductive interconnect 64 and the source/drain region 58electrically connected with interconnect 64 comprise, or consist of,n-type doped semiconductive material. Accordingly, n-type dopedsemiconductive material extends from the source/drain region, throughthe interconnect, and through the capacitor electrode.

Dielectric material 106 can comprise any suitable material, orcombination of materials. Exemplary materials suitable for dielectric106 are high dielectric constant materials including, for example,silicon nitride, aluminum oxide, TiO₂, Ta₂O₅, ZrO₂, etc.

The conductive interconnect 63 is in electrical connection with abitline 108. Top capacitor electrode 104 is shown in electricalconnection with an interconnect 110, which in turn connects with areference voltage 112, which can, in particular aspects, be ground. Theconstruction of FIG. 9 can be considered a DRAM cell, and such can beincorporated into a computer system as a memory device.

FIG. 10 shows construction 10 at a processing stage subsequent to thatof FIG. 7 and alternative to that described previously with reference toFIG. 8. In referring to FIG. 10, similar numbering will be used as isused above in describing FIG. 8, where appropriate.

A transistor construction 70 is shown in FIG. 10, and such constructiondiffers from the construction 50 described above with reference to FIG.8 in that construction 70 is a p-type field effect transistor (PFET)rather than the NFET of FIG. 8. Transistor device 70 comprises an n-typedoped channel region 72 and p⁺-doped source/drain regions 74. In otherwords, the channel region and source/drain regions of transistor device70 are oppositely doped relative to the channel region and source/drainregions described above with reference to the NFET device 50 of FIG. 8.

The strained crystalline lattice material 40 of the PFET device 70 canconsist of appropriately doped silicon, or consist of appropriatelydoped silicon/germanium. It can be most advantageous if the strainedcrystalline lattice material 40 comprises appropriately dopedsilicon/germanium in a PFET construction, in that silicon/germanium canbe a more effective carrier of holes with higher mobility than issilicon without germanium.

The transistor devices discussed above (NFET device 50 of FIG. 8, andPFET device 70 of FIG. 10) can be utilized in numerous constructions inaddition to the construction described above with reference to FIG. 9.Another exemplary construction is described with reference to FIGS. 11and 12.

FIGS. 11 and 12 show a semiconductor construction 100 comprising asubstrate 102 having an insulative layer 104 formed thereover. Substrate102 and insulative layer 104 can comprise, for example, the materialsdescribed previously with reference to substrate 12 and insulator layer14, respectively. Accordingly, substrate 102 can comprise, for example,one or more of glass, aluminum oxide, silicon dioxide, metal,semiconductor material and plastic. Layer 104 can comprise any suitableelectrically insulative material, including, for example, silicondioxide. Layer 104 can be formed physically against substrate 102, orcan be separated from substrate 102 by one or more interveningmaterials, including, for example, a chemically passive thermally stablematerial, such as silicon nitride.

A first crystalline layer 106, second crystalline layer 108, and thirdcrystalline layer 110 are formed over insulative material 104. Layers106, 108 and 110 can correspond to a silicon seed layer, relaxedcrystalline lattice layer, and strained crystalline lattice layer,respectively. In particular aspects, layers 106, 108 and 110 cancomprise materials described previously for layers 16, 26 and 40,respectively, of FIGS. 2-7. Accordingly, layer 108 can comprise relaxedsilicon/germanium; with the germanium being present to from about 10atomic % to about 60 atomic %. Layer 110 can comprise, consistessentially of, or consist of doped strained silicon; or alternativelycan comprise, consist essentially of, or consist of doped strained orunstrained silicon/germanium. Layer 106 can comprise, consistessentially of, or consist of doped silicon.

A dielectric material 112 is over layer 110, and a transistor gate 114is over dielectric material 112. Dielectric material 112 can comprise,consist essentially of, or consist of silicon dioxide. Transistor gate114 can comprise, for example, one or more of metal andconductively-doped silicon; and can, for example, comprise materialsdescribed previously with reference to transistor gate 54 of FIGS. 8-10.

A pair of source/drain regions 116 extend through strained crystallinelattice layer 110 and into relaxed crystalline lattice layer 108. Thesource/drain regions comprise a shallow portion 118, and a deeperportion 120. Such shape of the source/drain regions can be accomplishedutilizing a first shallow implant, followed by formation of sidewallspacers:(not shown) along sidewalls of gate 114, and a subsequent deepimplant of n-type material. The sidewall spacers can then be removed toleave the resulting structure shown in FIG. 11. Alternatively, thesidewall spacers can be left in place to form a structure similar tothat of FIG. 8 (with the sidewall spacers of FIG. 8 being labeled as60).

A channel region 122 extends beneath gate 114, and between source/drainregions 116. An NFET transistor device comprises gate 114, source/drainregions 116 and channel region 122. Although the shown transistor deviceis an NFET device, it is to be understood that the invention encompassesother aspects (not shown) in which the transistor device is a PFETdevice.

Source/drain regions 116 and channel region 122 define an active regionof the transistor device. For reasons described previously, it can beadvantageous to have the entirety of the portion of the active regionwithin layer 108 contained within a single crystal of the crystallinematerial of layer 108; and it can also be advantageous to have theentirety of the portion of the active region within layer 110 containedwithin a single crystal of the material 110. Also, although thesource/drain regions are shown terminating above layer 106, it is to beunderstood that the invention encompasses other aspects (not shown) inwhich the source/drain regions extend into layer 106. In such aspects,it can be advantageous if the entirety of the portion of the activeregion within layer 106 is contained within a single crystal of material106.

The crystalline materials of layers 106, 108 and 110 can bemonocrystalline in order that an entirety of the active region withinsuch crystalline materials is within single crystals of the materials.Alternatively, the materials can be polycrystalline, with individualsingle crystals being large enough to accommodate an entirety of theportion of the active region extending within the various materials. Inparticular aspects, layers 108 and 110 will be extensions of acrystalline lattice defined by material 106. In such aspects, anentirety of the active region of the transistor device will preferablyextend within only a single crystal encompassing materials 106, 108 and110.

A conductive pillar 130 is formed in electrical connection with one ofthe source/drain regions 116. In the shown embodiment, pillar 130comprises n-type doped silicon, and is formed in physical contact withan upper surface of layer 110. The material of pillar 130 can be formedby, for example, selective epitaxial growth of semiconductive materialover layer 110. The material of pillar 130 can subsequently be doped byout-diffusion of dopant from source/drain region 116 into thesemiconductive material of pillar 130, or alternatively by ionimplantation.

A pair of crystalline materials 132 and 134 are formed over pillar 130.In alternative embodiments, layers 132 and 134 can be replaced with asingle layer (not shown). In aspects in which pillar 130 comprises acrystalline semiconductive material, layers 132 and 134 can be formed byepitaxial growth over the semiconductive material of pillar 130, and/orby one or more techniques discussed previously with reference to FIGS.5-7. In the shown aspect of the invention, pillar 130 comprises an uppersurface 131, and layer 132 is formed physically against such uppersurface.

An electrical node 136 is formed at a location distant from conductivepillar 130, and crystalline materials 132 and 134 extend between node136 and pillar 130. Crystalline materials 132 and 134 together define aresistor 135 extending between a first electrical node defined by pillar130, and a second electrical node defined by the shown node 136. Node136 can comprise any suitable conductive material, including, a suitablydoped semiconductive material. In the shown embodiment, node 136comprises n-type doped semiconductive material. Such semiconductivematerial can be, for example, silicon, and can be in a monocrystalline,polycrystalline, or amorphous form.

Crystalline materials 132 and 134 may or may not comprise differentcompositions from one another. Crystalline material 132 can comprise,consist essentially of, or consist of p-type doped silicon; andcrystalline material 134 can comprise, consist essentially of, orconsist of p-type doped silicon/germanium. Alternatively, the two layerscan be replaced with a single layer of either p-doped silicon or p-dopedsilicon/germanium.

If crystalline material 134 comprises p-type doped silicon/germanium,the germanium content can be, for example, from about 10 atomic % toabout 60 atomic %. Crystalline materials 132 and 134 can bepolycrystalline, or monocrystalline. In particular aspects, crystallinematerial 132 can be considered to be a silicon seed layer, andcrystalline material 134 can be considered to be a second crystallinelayer epitaxially grown over the silicon seed layer. In particularaspects, crystalline material 130 can be considered to be a silicon seedlayer and 132/134 can be replaced with a second crystalline layer.

Crystalline materials 132 and 134 are oppositely doped relative tosource/drain regions 116, and electrical nodes 130 and 136; and in theshown embodiment are doped with p-type dopant. Such doping of materials132 and 134 can be accomplished by, for example, one or more suitableimplants. Crystalline materials 132 and 134 can be doped simultaneously,or sequentially. In a particular aspect, crystalline material 132 isdoped prior to formation of material 134; and crystalline material 134is subsequently doped by out-diffusion from material 132.

Resistor 135 is electrically connected with one of the source/drainregions 116 through conductive pillar 130. In the shown embodiment, oneof the crystalline layers 132 and 134 physically contacts conductivepillar 130. It is to be understood, however, that the inventionencompasses other aspects (not shown) in which an intervening conductivematerial is provided between crystalline materials 132 and 134 andconductive pillar 130, as well as other aspects (not shown) in whichboth of crystalline materials 132 and 134 physically contact conductivepillar 130. Also, it is to be understood that even though only twocrystalline layers are shown within the illustrated resistor 135, theinvention encompasses other aspects (not shown) wherein more than twocrystalline layers are incorporated into a resistor construction.

Both of crystalline materials 132 and 134 of resistor 135 contactelectrical node 136. It is to be understood, however, the inventionencompasses other aspects (not shown) in which only one of crystallinematerials 132 and 134 contacts electrical node 136.

An insulative material (or mass) 140 is over gate 114, and resistor 135is separated from gate 114 by the insulative material. In the shownembodiment, resistor 135 extends across gate 114, and accordingly aportion of resistor 135 is directly over gate 114. In the shown aspectof the invention, both of crystalline layers 132 and 134 physicallycontact insulative mass 140; the mass being against an upper surface ofmaterial 134 and against a lower surface of material 132.

Construction 100 includes a contact 166 extending from a source/drainregion 116, through an opening in resistor 135 (the opening has aperiphery 142), and to an interconnect 152 which electrically connectswith ground (not shown). Construction 100 also includes a contact 164(shown in phantom view in FIG. 11 as it is behind the cross-section ofFIG. 11). Contact 164 extends to node 136. An interconnect 150 (shown inphantom view in the cross-section of FIG. 11) extends between contact164 and V_(DD) (not shown in FIG. 11). In particular aspects, node 136can be considered to be part of the electrical connection to V_(DD).

FIG. 12 illustrates a top view of construction 100, with insulative mass140 not being shown in FIG. 12 to aid in clarity of the illustration.Gate 114 is part of a conductive line 160, which is connected thoroughan electrical stud 162 to other circuitry.

Resistor 135 is shown comprising a “L” shape having an opening extendingtherethrough for passage of contact 166. Resistor 135 is shown tocomprise an outer surface 144, and an inner surface 142. The innersurface 142 defines a periphery of the opening around the contact 166.

FIG. 11 shows various different dopant levels, and utilizes thedesignations p+, p, p−, n−, n and n+ to distinguish the levels. Thedifference in dopant concentration between the regions identified asbeing p+, p, and p− are typically as follows. A p+ region has a dopantconcentration of at least about 10²⁰ atoms/cm³, a p region has a dopantconcentration of from about 10¹⁴ to about 10¹⁸ atoms/cm³, and a p−region has a dopant concentration in the order of or less than 10¹⁶atoms/cm³. It is noted that regions identified as being n−, n and n+will have dopant concentrations similar to those described aboverelative to the p−, p and p+ regions respectively, except, of course,the n regions will have an opposite-type conductivity enhancing dopanttherein than do the p regions.

The p+, p, and p− dopant levels are shown in the drawing only toillustrate differences in dopant concentration. It is noted that theterm “p” is utilized herein to refer to both a dopant type and arelative dopant concentration. To aid in interpretation of thisspecification and the claims that follow, the term “p” is to beunderstood as referring only to dopant type, and not to a relativedopant concentration, except when it is explicitly stated that the term“p” refers to a relative dopant concentration. Accordingly, for purposesof interpreting this disclosure and the claims that follow, it is to beunderstood that the term “p-type doped” refers to a dopant type of aregion and not a relative dopant level. Thus, a p-type doped region canbe doped to any of the p+, p, and p− dopant levels discussed above.Similarly, an n-type doped region can be doped to any of the n+, n, andn− dopant levels discussed above.

FIG. 13 illustrates generally, by way of example, but not by way oflimitation, an embodiment of a computer system 400 according to anaspect of the present invention. Computer system 400 includes a monitor401 or other communication output device, a keyboard 402 or othercommunication input device, and a motherboard 404. Motherboard 404 cancarry a microprocessor 406 or other data processing unit, and at leastone memory device 408. Memory device 408 can comprise various aspects ofthe invention described above, including, for example, the DRAM unitcell described with reference to FIG. 8. Memory device 408 can comprisean array,of memory cells, and such array can be coupled with addressingcircuitry for accessing individual memory cells in the array. Further,the memory cell array can be coupled to a read circuit for reading datafrom the memory cells. The addressing and read circuitry can be utilizedfor conveying information between memory device 408 and processor 406.Such is illustrated in the block diagram of the motherboard 404 shown inFIG. 14. In such block diagram, the addressing circuitry is illustratedas 410 and the read circuitry is illustrated as 412.

In particular aspects of the invention, memory device 408 can correspondto a memory module. For example, single in-line memory modules (SIMMs)and dual in-line memory modules (DIMMs) may be used in theimplementation which utilize the teachings of the present invention. Thememory device can be incorporated into any of a variety of designs whichprovide different methods of reading from and writing to memory cells ofthe device. One such method is the page mode operation. Page modeoperations in a DRAM are defined by the method of accessing a row of amemory cell arrays and randomly accessing different columns of thearray. Data stored at the row and column intersection can be read andoutput while that column is accessed.

An alternate type of device is the extended data output (EDO) memorywhich allows data stored at a memory array address to be available asoutput after the addressed column has been closed. This memory canincrease some communication speeds by allowing shorter access signalswithout reducing the time in which memory output data is available on amemory bus. Other alternative types of devices include SDRAM, DDR SDRAM,SLDRAM, VRAM and Direct RDRAM, as well as others such as SRAM or Flashmemories.

Transistor/resistor constructions of, for example, the type describedwith reference to FIGS. 11 and 12, can be incorporated into the computersystem 400. For instance, a circuit within the computer system can beprovided at VDD potential and another circuit can be provided at groundpotential. A source/drain region of the transistor can be electricallyconnected to the circuit at ground potential, and the other source/drainregion can be electrically coupled to the resistor which in turn iselectrically coupled to VDD potential.

In compliance with the statute, the invention has been described inlanguage more or less specific as to structural and methodical features.It is to be understood, however, that the invention is not limited tothe specific features shown and described, since the means hereindisclosed comprise preferred forms of putting the invention into effect.The invention is, therefore, claimed in any of its forms ormodifications within the proper scope of the appended claimsappropriately interpreted in accordance with the doctrine ofequivalents.

1-41 (cancelled).
 42. A semiconductor-on-insulator construction,comprising: a substrate; an insulator layer over the substrate; a firstcrystalline layer comprising silicon and germanium over the insulatorlayer; a transistor device supported by the first crystalline layer, thetransistor device comprising a gate and an active region proximate thegate; the active region including a channel region and a pair ofsource/drain regions; at least a portion of the active region beingwithin the first crystalline layer; an entirety of the active regionwithin the first crystalline layer being within a single crystal of thefirst crystalline layer; and a resistor in electrical connection withone of the source/drain regions; the resistor comprising p-dopedsemiconductive material.
 43. The construction of claim 42 wherein thep-doped semiconductive material of the resistor consists essentially ofp-doped Si/Ge.
 44. The construction of claim 42 wherein the p-dopedsemiconductive material of the resistor comprise at least two stackedlayers of p-doped semiconductive material.
 45. The construction of claim44 wherein the stacked layers are crystalline.
 46. The construction ofclaim 44 wherein each of the stacked layers is individuallymonocrystalline.
 47. The construction of claim 44 wherein at least oneof the stacked layers consists of p-type doped Si/Ge.
 48. Theconstruction of claim 42 wherein the first crystalline layer has arelaxed crystalline lattice, and further comprising a strainedcrystalline lattice layer between the first crystalline layer and thetransistor device gate.
 49. The construction of claim 48 wherein thestrained crystalline lattice layer includes silicon and germanium. 50.The construction of claim 48 wherein the strained crystalline latticelayer includes silicon.
 51. The construction of claim 50 wherein thetransistor device is an NFET device. 52-104 (cancelled).